Microactuated Micro-xyz Stages for Free-space Micro-optical Bench
نویسنده
چکیده
A novel microactuated micro-XYZ stage with large travel distance and fine positioning capability has been demonstrated using the surface-micromachming technology. The micro-XYZ stage consists of three inplane translation stages driven by integrated scratch drive actuators. Two vertically stacked 45" micromirrors in orthogonal directions are employed to achieve vertical beam adjustment without using vertical actuators. Large travel distance (> 30 pm) and fine moving steps (11 nm) have been achieved experimentally in all three directions. 'The micro-XYZ stage can be monolithically integrated with the surfacemicromachined microlenses, or other out-of-plane micro-optical elements, for optical alignment or reconfiguration in free-space micro-optical benches (FSMOB).
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